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Theory and simulation of dopant implantation and diffusion in SiGe

Contributors: Liu, Chun-Li
Orlowski, Marius
Thean, Aaron
Beardmore, Keith
Barr, Alex
White, Ted
Nguyen, Bich-Yen
Rueda, Hernan
Liu, Xiang-Yang
Contained in: Physica status solidi / B Berlin : Wiley-VCH Vol. 239, No. 1 (2003), p. 35-43
Journal Title: Physica status solidi / B
Fulltext access:
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ISSN: 0370-1972
Regional Holdings: TIB – German National Library of Science and Technology
ID (e.g. DOI, URN): 00925306
PPN (Catalogue-ID): OLC1649179987
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