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1.
Book

Proceedings of the 26th National Symposium of the American Vacuum Society : 1 - 5 October, 1979, New York, NY,

Published: New York, NY, American Inst. of Physics, 1980
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2.
Journal

Journal of vacuum science and technology : JVST ; an AVS journal / B Nanotechnology & microelectronics : materials, processing, measurement, & phenomena

Published: New York, NY, Inst., 1983-
Corporate Author: American Vacuum Society
Available holdings
Location/Call Number: UB - Freihandmagazin MS Z 302
Bestand: 1.1983 - 31.2013
Journal volumes available Check individual volumes/copies
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3.
Electronic Journal

Biointerphases

Published: Melville, NY, AIP, 2006-
Corporate Author: American Vacuum Society
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5.
Journal

Journal of vacuum science & technology : the official journal of the American Vacuum Society

Published: New York, NY, Inst., 1964-1982
Corporate Author: American Vacuum Society
Available holdings
Location/Call Number: UB - Freihandmagazin MS Z 302
Bestand: 1.1964 - 21.1982
Journal volumes available Check individual volumes/copies
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7.
Journal

Journal of vacuum science and technology : JVST ; an AVS journal / A Vacuum, surfaces, & films

Published: New York, NY, Inst., 1983-
Corporate Author: American Vacuum Society
Available holdings
Location/Call Number: UB - Freihandmagazin MS Z 302
Bestand: 1.1983 - 31.2013
Journal volumes available Check individual volumes/copies
Collecting details about holdings...
9.
Electronic Article

Effects of chlorine based gettering on the electrical properties of rapid thermal oxidation/nitridation dielectric films : Ermittlung des Einflusses von Chlor aus den elektrischen...

for Journal of Vacuum Science and Technology, Part A (Vacuums, Surfaces, and Films) | Vol. 11, No. 4, PT.1 (1993), p. 1039-1043
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10.
Electronic Article

Highly conductive silicon films via plasma-enhanced chemical vapor deposition at low temperatures : Hochleitfähige Siliziumschichten durch plasmaunterstützte Gasphasenabscheidung b...

for Journal of Vacuum Science and Technology, Part A (Vacuums, Surfaces, and Films) | Vol. 11, No. 4, PT.2 (1993), p. 1858-1862
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