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2.
Electronic Article

Germanium Junctions for Beyond-Si Node Using Flash Lamp Annealing (FLA)

for MRS Advances, Electronic Devices and Materials | Vol. 2, No. 51 (2017), p. 2921-2926
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5.
Electronic Article

Key issues in plasma-source ion implantation : Schlüsselprobleme bei der Plasma-Ionenimplantation

for Surface and Coatings Technology | Vol. 96, No. 1 (1997), p. 45-51
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9.
Electronic Article

Dose uniformity of sub-keV implants

for Ion Implantation Technology - 2000, International Conference on Ion Implantation Technology, 2000 | (2000), p. 658-661
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10.
Electronic Article

Production of ion beam using plasma filament ion source : Erzeugung eines Ionenstrahls mit Hilfe einer Plasmafilament-Ionenquelle

for Japanese Journal of Applied Physics, Part 1 | Vol. 26, No. 7 (1987), p. 1179-1184
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