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Boron thermistors : Bor-Thermistoren

We have developed a process which allows thin film boron thermistors to be produced and which, at the same time, provides electrical contacts to the semiconducting film. The deposition of boron was carried out by the thermal reduction of boron trichloride with hydrogen. Molybdaen or tungsten have be... Full description

Contained in: Thin Solid Films Vol. 36, No. 2 (1976), p. 487-491
Fulltext access:
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Links: Additional Link (dx.doi.org)
Additional Keywords: BOR
DUENNSCHICHT
HEISSLEITER
TEMPERATUREINFLUSS
TEMPERATURMESSUNG
WIDERSTANDSWERT:ELEKTRISCH
DOI: 10.1016/0040-6090(76)90065-1
Notes: Copyright: Metadaten: TEMA, Copyright WTI-Frankfurt eG
Copyright: (C) Alle Rechte beim Herausgeber
Physical Description: 5 Seiten, 7 Bilder, 9 Quellen
ID (e.g. DOI, URN): 10.1016/0040-6090(76)90065-1
PPN (Catalogue-ID): WTI010281789
Note: WTI TEMA DB
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520 |a We have developed a process which allows thin film boron thermistors to be produced and which, at the same time, provides electrical contacts to the semiconducting film. The deposition of boron was carried out by the thermal reduction of boron trichloride with hydrogen. Molybdaen or tungsten have been found to be the most suitable materials for the substrate. The thermistors can find suitable applications when precise measurements of high temperatures in localized spots are required. The miniaturization also provides a fast response. Moreover the simple analytical relation between resistance and temperature allows the use of simple electronic circuitry to display the measured values of temperature. 
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