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Principles of denuded zone formation = : Prinzipien der DZ (denuded zone)-Bildung

The present paper deals with further experiments especially on the influence of the atmosphere on the DZ formation and on the interactions between volume defect formation and DZ stability.

Contained in: 2nd International Autumn Meeting 1987, Gettering and Defect Engineering in the Semiconductor Technology, Garzau, DDR (1987), p. 323-328
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Additional Keywords: BOR
DIFFUSION
GITTERFEHLER
INFRAROTSPEKTROMETRIE
KOHLENSTOFF
RASTERELEKTRONENMIKROSKOP
SAUERSTOFF
SILICIUM
TEMPERATUREINFLUSS
VERUNREINIGUNG
WAERMEBEHANDLUNG
ZEITVERHALTEN
Notes: Copyright: Metadaten: TEMA, Copyright WTI-Frankfurt eG
Copyright: (C) Alle Rechte beim Herausgeber
Physical Description: 6 Seiten, 6 Bilder, 1 Tabelle, 17 Quellen
PPN (Catalogue-ID): WTI02385345X
Note: WTI TEMA DB
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Internes Format
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500 |a Copyright: Metadaten: TEMA, Copyright WTI-Frankfurt eG 
500 |a Copyright: (C) Alle Rechte beim Herausgeber 
520 |a The present paper deals with further experiments especially on the influence of the atmosphere on the DZ formation and on the interactions between volume defect formation and DZ stability. 
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653 4 |a TEMPERATUREINFLUSS 
653 4 |a ZEITVERHALTEN 
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