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Tantalum thin-film superconducting transition edge thermometers

Sputter deposited Ta thin films make excellent superconducting transition edge temperature sensors. Depending on film thickness, their transition temperature, Tc, ranges from 4.4K to as least as low as 0.5K. A figure of merit of 50K-1 is easily achieved. The films are mechanically extremely strong,... Full description

Published: New York, Kluwer Academic/Plenum Publishers, 2000
Kongresse: International Symposium on Quantum Fluids and Solids 2000 2000.06.06-2000.06.11 Minneapolis, MN, US
QFS 2000 2000.06.06-2000.06.11 Minneapolis, MN, US
International Symposium on Quantum Fluids and Solids 2000.06.06-2000.06.11 Minneapolis, MN, US
QFS 2000 2000.06.06-2000.06.11 Minneapolis, MN, US
Contained in: Journal of Low Temperature Physics Vol. 121, No. 5-6 (2000), p. 821-824
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ISSN: 0022-2291
Additional Keywords: ALTERN:WERKSTOFF
DUENNSCHICHT
MECHANISCHE-FESTIGKEIT
SPUTTERABSCHEIDUNG
SUPRALEITENDE-DUENNE-SCHICHT
SUPRALEITUNGSSPRUNGTEMPERATUR
TANTAL
THERMOMETER
WAERMEBEHANDLUNG
Notes: Copyright: Metadaten: TEMA, Copyright WTI-Frankfurt eG
Copyright: (C) Alle Rechte beim Herausgeber
Physical Description: 4 Seiten, 1 Quelle
PPN (Catalogue-ID): WTI038053756
Note: WTI TEMA DB
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Internes Format
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520 |a Sputter deposited Ta thin films make excellent superconducting transition edge temperature sensors. Depending on film thickness, their transition temperature, Tc, ranges from 4.4K to as least as low as 0.5K. A figure of merit of 50K-1 is easily achieved. The films are mechanically extremely strong, and at room temperature show minimal aging. Using a simple heat treatment technique, Tc can be tuned to the desired operating range. 
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